PEODUCT
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R2R Coating System
TITAN Series
TITAN series is composed to enable continuous coating of single thin film and multi-layered thin film, and is equipment composed of single vacuum chamber to enable continuous coating on the metal and reactive materials.
Application Products
The TITAN series of Advanced Technologies Co., Ltd separates the metal material or the reactive material to enable continuous coating of hetero-material, and can be applied to various application products.
| IT field | IM-ITO and metal mesh touch film, Bezel metallization of display |
| Energy field | Thin film solar cell, Li secondary battery |
| Other industrial field | Multi-layered thin film coating based application field |
System specifications
The R2R coating equipment manufacturing method of Advanced Technologies Co., Ltd is based on the customer request specification to manufacture the product in optimum efficiency. Based on this factor, the common specifications below are reflected to manufacture and supply the equipment.
| Chamber type | Rectangular Type Single Chamber | |||
| Applied material | PET, PI film, other flexible polymer film, metal film | |||
| Core size | 3inch, 6inch | |||
| Material specification | Width | Length | Thickness (Polymer) | Thickness (Metal) |
| Max. 1,350㎜ | Max.ø550㎜ | Min. 23㎛ | 100㎛ ~ 400㎛ | |
| Winding speed | Max. 20m/min | |||
| Pre-treatment method | Pre-heating | Max. 200℃ | ||
| Plasma surface treatment | DC, Pulse DC, Linear ion beam source | |||
| Coating source | Sputter Source | Single Planar Cathode / Dual Planar Cathode Single Rotary Cathode / Dual Rotary Cathode | ||
| Thermal Source | Crucible, E-Beam | |||
| Plasma assist source | Plasma Assist Source | |||
| 증착물질 | Coating material | Al, Ti, Cr, Cu, NiCr, Ni, Ag, other metal material | ||
| 반응성물질 | TiO2, Nb2O5, SiO2, TIO, SiAlOx, MoOx, other nitride / oxide material | |||
| Power Supply | DC, Pulse DC, MF | |||
| Pump | Selection of the pump proper to the equipment specification | |||
| Measuring instrument | Sheet resistance, optic (Transmittance, reflectance, color-difference meter), plasma emission monitor, RGA | |||
| Web align | EPC Module | |||